Electron backscatter diffraction study for advanced semiconductor interconnect materials analysis

3-dimensional (3D) semiconductor packaging and interconnection technology, which involves vertically stack IC chips that are electrically interconnected by inter-layer vias and solder joints, is being used to achieve better performance, lower power consumption, and higher integration capability. As...

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Bibliographic Details
Main Author: Lee, Aaron Wai Ken
Other Authors: Gan Chee Lip
Format: Thesis-Master by Research
Language:English
Published: Nanyang Technological University 2022
Subjects:
Online Access:https://hdl.handle.net/10356/159399
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Institution: Nanyang Technological University
Language: English

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