High-k hafnium oxide based thin films using laser molecular beam epitaxy for gate dielectrics

• Main Author: Lu, Yuekang
• Other Authors: Zhu Weiguang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
• Online Access: https://hdl.handle.net/10356/3502
• Institution: Nanyang Technological University

The constant increase in integrated circuit densities predicted by Moore’s law requires the continuous reduction of the CMOS device dimensions such as the gate length, gate oxide thickness, etc. Silicon dioxide (SiO2) has been used as the gate oxide and been aggressively scaled for more than 30 year...