Quasi-static analysis and modeling for micro ohmic contacts in MEMS switches

• Main Author: See, Raymond Seng Hong.
• Other Authors: Wang Hong
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: http://hdl.handle.net/10356/45856
• Institution: Nanyang Technological University

Microelectromechanical Systems (MEMS) have been developed since the 1970s for pressure and temperature sensors, accelerometers, gas chromatographs and other sensor devices. In the recent versions of Nintendo’s Wii, MEMS plays an important part to allow the Wii controller to respond to changes in dir...