Calibration methodology for predictive simulation of sub-0.13 technology CMOS device's performance

• Main Author: Leong, Vincent Kum Woh.
• Other Authors: Zhu, Weiguang
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/4595
• Institution: Nanyang Technological University

This report describes a calibration methodology for predictive simulation of sub-0.13 pm technology CMOS device’s performance. It provides an introduction to TCAD simulators (TSUPREM4 and MEDICI) and reviews the physical models and parameters that are implemented in this calibration methodology. The...