Simulating the electron beam induced current (EBIC) effect in a computer
Electron-Beam-Induced Current (EBIC) is a technique that makes use of the induced current generated as the result of the electron beam bombardment upon the specimen for semiconductor materials and devices characterisation. Material characterisation is one of the important fields i...
Saved in:
Main Author: | Lim, Wei lun |
---|---|
Other Authors: | Ong Keng Sian, Vincent |
Format: | Final Year Project |
Language: | English |
Published: |
2012
|
Subjects: | |
Online Access: | http://hdl.handle.net/10356/49296 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
Similar Items
-
Verification of selected electron beam induced current (EBIC) techniques
by: Ang, Alex Yong Guan
Published: (2008) -
Choice of generation volume models for electron beam induced current computation
by: Ong, Vincent K. S., et al.
Published: (2010) -
Simulation, modeling and parameter extraction studies in EBIC mode of SEM
by: Tan, Chee Chin
Published: (2014) -
Junction depth & defect characterization with the use of EBIC
by: Phua, Poh Chin.
Published: (2008) -
Theory of the single contact electron beam induced current effect
by: Lau, K. T., et al.
Published: (2009)