Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition

• Main Authors: Chen, B. J., Kwok, H. S., Zhang, X. H., Chua, S. J., Tan, Swee Tiam, Sun, Xiaowei, Fan, Weijun
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: https://hdl.handle.net/10356/80008; http://hdl.handle.net/10220/18001
• Institution: Nanyang Technological University

The optical band gap of ZnO thin films deposited on fused quartz by metal-organic chemical-vapor deposition was studied. The optical band gap of as-grown ZnO blueshifted from 3.13 to 4.06 eV as the growth temperature decreased from 500 to 200 °C. After annealing, the optical band gap shifted back to...