Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film

• Main Authors: Chen, Rui, Qi, D. F., Ruan, Y. J., Pan, S. W., Chen, S. Y., Xie, Sheng, Li, Cheng, Lai, H. K., Sun, H. D.
• Other Authors: School of Physical and Mathematical Sciences
• Format: Article
• Language: English
• Published: 2013
• Online Access: https://hdl.handle.net/10356/98917; http://hdl.handle.net/10220/12544
• Institution: Nanyang Technological University

The investigations of silicon-rich silicon nitride film grown by plasma-enhanced chemical vapor deposition and then annealed by excimer laser have been carried out systematically. The surface roughness and the crystallization of the films have significantly been improved after the excimer laser anne...