Low-temperature surface passivation of moderately doped crystalline silicon by atomic-layer-deposited hafnium oxide films

Low-temperature surface passivation of moderately doped crystalline silicon by atomic-layer-deposited hafnium oxide films

10.1149/2.026301jss

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Bibliographic Details
Main Authors:	Lin, F., Hoex, B., Koh, Y.H., Lin, J., Aberle, A.G.
Other Authors:	SOLAR ENERGY RESEARCH INST OF S'PORE
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/113260
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Institution:	National University of Singapore

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