Effect of Pt on agglomeration and Ge out diffusion in Ni(Pt) germanosilicide

Effect of Pt on agglomeration and Ge out diffusion in Ni(Pt) germanosilicide

10.1063/1.1977196

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Bibliographic Details
Main Authors: Jin, L.J., Pey, K.L., Choi, W.K., Fitzgerald, E.A., Antoniadis, D.A., Pitera, A.J., Lee, M.L., Chi, D.Z., Rahman, Md.A., Osipowicz, T., Tung, C.H.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55760
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Institution: National University of Singapore

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