Characterization of rf-sputtered yttrium oxide films
Vacuum
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Main Authors: | Ling, C., Bhaskaran, J., Choi, W. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80323 |
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Institution: | National University of Singapore |
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