Chemical vapor deposition of germanium nanocrystals on hafnium oxide for non-volatile memory applications
Materials Research Society Symposium Proceedings
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Main Authors: | Wang, Y.Q., Chen, J.H., Yoo, W.J., Yeo, Y.-C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83547 |
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Institution: | National University of Singapore |
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