Resist materials for proton micromachining

Resist materials for proton micromachining

10.1016/S0168-583X(99)00392-4

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書目詳細資料
Main Authors:	Van Kan, J.A., Sanchez, J.L., Xu, B., Osipowicz, T., Watt, F.
其他作者:	PHYSICS
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/97808
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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