Effects of low-fluence swift iodine ion bombardment on the crystallization of ion-beam-synthesized silicon carbide
Ion beam synthesis using high-fluence carbon ion implantation in silicon in combination with subsequent or in situ thermal annealing has been shown to be able to form nanocrystalline cubic SiC (3C-SiC) layers in silicon. In this study, a silicon carbide layer was synthesized by 40-keV C 12 + implant...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34247585163&partnerID=40&md5=43afd7288ea947d12eb9a5b3c2bbe8fa http://cmuir.cmu.ac.th/handle/6653943832/5258 |
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| Institution: | Chiang Mai University |
| Language: | English |