Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer

Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer

Micro Electro Mechanical systems (MEMS), the combination of micro sensors, micro actuators, and microstructures, is attracting more and more attention all over the world. MEMS technology promises to develop smart products that are of low cost, small size and high performance.

Saved in:

書目詳細資料
主要作者:	Su, Cheng.
其他作者:	Du, Hejun
格式:	Theses and Dissertations
語言:	English
出版:	2008
主題:	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
在線閱讀:	http://hdl.handle.net/10356/13398
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

相似書籍

RF MEMs devices development for telecommunications
由: Liu, Ai Qun, et al.
出版: (2008)

Development of MEMS devices for vibration and acoustic sensing and actuation applications
由: Lin, Rongming, et al.
出版: (2008)

Novel structures and materials for microelectromechanical system (MEMS) devices
由: Low, Duong Sin.
出版: (2008)

Design and fabrication of a MEMS based energy scavenging device : suspended in-plane overlap energy converter
由: Lim, Peter Chin Leng.
出版: (2010)

Experimental study of in-plane poled piezoelectric diaphragm-based MEMS devices
由: Shen, Zhiyuan.
出版: (2013)

Ferroelectric films for MEMS type devices using novel hybrid processing technology
由: Zhao, Chang Lei
出版: (2008)

Development of pico-satellite : MEMS based ADCS sensors
由: Rahul Agrawal
出版: (2010)

Development of broadband optical swtiches for DWDM networks based on photonics MEMS
由: Dowd, Philip, et al.
出版: (2008)

Digital Lensless microscope : MEMS application
由: Ma Myat, Thu Zar
出版: (2009)

Polymer based optical MEMS (POEMS)
由: Franck Chollet.
出版: (2009)

Polishing and planarization of polymeric materials for MEMS applications
由: Tan, Yew Heng.
出版: (2008)

Characterization of MEMS cantilevers using lensless digital holographic microscope
由: Andrei, Alexandru, et al.
出版: (2011)

Quasi-static analysis and modeling for micro ohmic contacts in MEMS switches
由: See, Raymond Seng Hong.
出版: (2011)

Study and analysis of different contact materials for ohmic RF MEMS switch
由: Raihanah Abdul Razak
出版: (2011)

Micromachined tunable filters using MEMS switches and electromagnetic bandgap structures
由: Muhammad Faeyz Karim
出版: (2010)

Investigation of silicon-based encapsulation for MEMS structures using epi-based processing
由: Oh, Yun Sheng.
出版: (2009)

Quasi electrical contact behaviors of metal micro-contacts for micro/nano-electromechanical systems (MEMS/NEMS)
由: Qiu, Haodong
出版: (2015)

Very thin plastic packaging of wafer-level-capped MEMS device
由: Lacsamana, Elmer S.
出版: (2006)

Control of micro-electro-mechanical systems (MEMS) based micro-mirror devices
由: Tan, Yan Hao
出版: (2015)

Development of MEMS airflow sensors
由: Abdul Rahman Mohd Hassan
出版: (2011)

Design of a heat flux sensor by MEMS technology
由: Wan, Siew Ping
出版: (2008)

Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
由: Dong, Bin
出版: (2015)

Study and analysis of thin film contact behaviours in micro/nano devices
由: Huang, Zhongwei.
出版: (2011)

Application of three dimensional electromechanical impedance model for damage assessment of plate
由: Annamdas Venu Gopal Madhav, et al.
出版: (2013)

Active MEMS metamaterials for THz bandwidth control
由: Shih, Kailing, et al.
出版: (2017)

A piezoelectric-driven three-dimensional MEMS VOA using attenuation mechanism with combination of rotational and translational effects
由: Koh, K.H., et al.
出版: (2014)

Process development for moving mechanical assemblies
由: Tay, Beng Kang
出版: (2008)

Boundary element analysis of a piezoelectric transformer
由: Wan, Desmond Wei-Jian
出版: (2013)

An open-loop nano-positioning micromechanical digital-to-analog converter for grating light modulation
由: Zhou, G., et al.
出版: (2014)

Proposal for a micromachined dynamically tuned gyroscope, based on contactless suspension
由: Poletkin, Kirill V., et al.
出版: (2011)

Compact piezoelectric micromotor with a single bulk lead zirconate titanate stator
由: Yan, Liang, et al.
出版: (2013)

Adaptive finite-time consensus control of a group of uncertain nonlinear mechanical systems
由: Huang, Jiangshuai, et al.
出版: (2015)

A miniaturized millimeter-wave standing-wave filtering switch with high P1dB
由: Ma, Kaixue, et al.
出版: (2013)

Optomems device development for DWDM system applications
由: Liu, Ai Qun.
出版: (2008)

Helical wave-front laser beam generated with a Microelectromechanical Systems (MEMS)-based device
由: Zhou, G., et al.
出版: (2014)

Application of FFT in testing the sensitivity of a typical single-axis integrated circuit Hi-G MEMS accelerometer
由: Caguioa, Robert Z.
出版: (2005)

A multi-frequency vibration-based MEMS electromagnetic energy harvesting device
由: Liu, H., et al.
出版: (2014)

On-chip thermal emitter for filter-free multi-gas sensing
由: Guo, Yiyun
出版: (2020)

5G ladder-type BAW filter design
由: Zhou, Haorong
出版: (2021)

Modeling and characterization of nano-gap contact acceleration switch for ultra-low power IoT sensor node
由: Hu, Zhongshi
出版: (2023)