Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer

Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer

Micro Electro Mechanical systems (MEMS), the combination of micro sensors, micro actuators, and microstructures, is attracting more and more attention all over the world. MEMS technology promises to develop smart products that are of low cost, small size and high performance.

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書目詳細資料
主要作者:	Su, Cheng.
其他作者:	Du, Hejun
格式:	Theses and Dissertations
語言:	English
出版:	2008
主題:	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
在線閱讀:	http://hdl.handle.net/10356/13398
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University
語言:	English

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