Rapid thermal processing of GAN-based and ALGAINP-based semiconductors for semiconductor laser applications

• Main Authors: Yuan, Shu, Hing, Peter, Ooi, B. S., Zhang, Dao Hua, Chua, Soon Jun
• Other Authors: School of Materials Science & Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/6777
• Institution: Nanyang Technological University

This project aimed (1) to establish the relationship between the processing parameters involved in rapid thermal annealing (RTA) and anodic oxide induced intermixing (AOII) and material properties of semiconductor epitaxial layers, and (2) to establish the relationship between the processing paramet...