STUDY OF PROCESS IMPACT ON K VALUE OF LOW K DIELECTRIC MATERIAL USED IN CU / LOW K DUAL DAMASCENE INTERCONNECT
Master's
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Main Author: | WONG KAH LEONG |
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Other Authors: | SINGAPORE-MIT ALLIANCE |
Format: | Theses and Dissertations |
Published: |
2019
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Subjects: | |
Online Access: | https://scholarbank.nus.edu.sg/handle/10635/154133 |
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Institution: | National University of Singapore |
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