Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

Optimal predictive control with constraints for the processing of semiconductor wafers on bake plates

10.1109/66.827348

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書目詳細資料
Main Authors:	Ho, W.K., Tay, A., Schaper, C.D.
其他作者:	ELECTRICAL ENGINEERING
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/62560
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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