Full range workfunction tunning of MOSFETs using interfacial yttrium layer in fully germanided Ni gate
10.1149/1.2727410
Saved in:
Main Authors: | Yu, H.P., Pey, K.L., Choi, W.K., Antoniadis, D.A., Fitzgerald, E.A., Dawood, M.K., Ow, K.Q., Chi, D.Z. |
---|---|
Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/70390 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
The effect of an yttrium interlayer on a Ni germanided metal gate workfunction in SiO2/HfO2
by: Yu, H.P., et al.
Published: (2014) -
Work function tuning of n -channel metal-oxide field-effect transistors using interfacial yttrium layer in fully silicided nickel gate
by: Yu, H.P., et al.
Published: (2014) -
Low workfunction fully suicided gate on SiO2/Si and LaAlO 3/GOI n-MOSFETs
by: Yu, D.S., et al.
Published: (2014) -
Fully Silicided NiSi and Germanided NiGe Dual Gates on SiO 2 n- and p-MOSFETs
by: Yu, D.S., et al.
Published: (2014) -
Fully Silicided NiSi and Germanided NiGe Dual Gates on SiO 2/Si and Al 2O 3/Ge-On-Insulator MOSFETs
by: Huang, C.H., et al.
Published: (2014)