Optical scanning with MEMS in-plane vibratory gratings and its applications
10.1109/OMEMS.2010.5672205
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Main Authors: | Zhou, G., Du, Y., Cheo, K.K.L., Yu, H., Chau, F.S. |
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其他作者: | MECHANICAL ENGINEERING |
格式: | Conference or Workshop Item |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/73719 |
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