Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction

Uniform void-free epitaxial CoSi 2 formation on STI bounded narrow Si(lOO) lines by template layer stress reduction

10.1149/1.1798191

Saved in:

書目詳細資料
Main Authors:	Ho, C.S., Pey, K.L., Tung, C.H., Zhang, B.C., Tee, K.C., Karunasiri, G., Chua, S.J.
其他作者:	ELECTRICAL ENGINEERING
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/81331
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

相似書籍

Thermal studies on stress-induced void-like defects in epitaxial-CoSi 2 formation
由: Ho, C.S., et al.
出版: (2014)

Nitride-mediated epitaxy of CoSi2 on Si(001)
由: Chong, R.K.K., et al.
出版: (2014)

TEM Study of a RTO Oxide-Interfacial Layer on Epitaxial-Cobalt Silicide (CoSi2) Formation
由: Ng Khim Hong
出版: (2019)

ANALISIS KINERJA KEUANGAN PERUM PERUMNAS BERDASARKAN SK MENTERI BUMN No. KEP-lOO/MBU/2OO2
由: SETYO ERRI TRI KURNIAWAN, 049715700
出版: (2003)

STI-induced damage and hot-carrier reliability in the narrow width short channel NMOSFET fabricated using global strained-Si technology
由: Phua, W.H.T., et al.
出版: (2014)

Growth dynamics of low-dimensional CoSi 2 nanostructures revisited: Influence of interface structure and growth temperature
由: Ong, B.L., et al.
出版: (2014)

Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
由: Lim, E.H., et al.
出版: (2014)

Reactive epitaxy of Co nanoparticles on (111)Si
由: Yeadon, M., et al.
出版: (2014)

Effect of BF2 + implantation on void formation in Ti-salicided narrow polysilicon lines
由: Pey, K.L., et al.
出版: (2014)

Impact of voids in Ti-salicided p+ polysilicon lines on TiSi2 electrical properties
由: Chua, H.N., et al.
出版: (2014)

Atomistic simulation of epitaxial Si film growth on Si (001) surface
由: Xie, Xuepeng.
出版: (2008)

COSY: COunterfactual SYntax for cross-lingual understanding
由: YU, Sicheng, et al.
出版: (2021)

Characterization of Ni- and Ni(Pt)-silicide formation on narrow polycrystalline Si lines by Raman spectroscopy
由: Lee, P.S., et al.
出版: (2014)

Effects of temperature and voids on the interfacial fracture of Si/a-Si3 N4 bilayer systems
由: Lin, Pamela, et al.
出版: (2015)

Growth mechanisms in thin film epitaxy of Si/SiGe from hydrides
由: Zhang, J., et al.
出版: (2014)

Optical second harmonic generation studies of epitaxial growth of Si and SiGe
由: Tok, E.S., et al.
出版: (2014)

Adsorption on epitaxial graphene on SiC(0001)
由: Huang, H., et al.
出版: (2014)

Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines
由: Lee, P.S., et al.
出版: (2014)

Phase and layer stability of Ni- and Ni(Pt)-silicides on narrow poly-Si lines
由: Mangelinck, D., et al.
出版: (2012)

STM observation of pit formation and evolution during the epitaxial growth of Si on Si(001) surface
由: Xu, M.-J., et al.
出版: (2014)

Growth of Co nanoclusters on SiC honeycomb templates
由: Chen, W., et al.
出版: (2014)

Epitaxial BiFeO3 thin films on Si
由: Droopad, R., et al.
出版: (2011)

Highly lattice-mismatched epitaxy for III-V/Si integration
由: Jia, Bowen
出版: (2018)

Nanopatterning and selective area epitaxy of GaN on Si substrate
由: Wang, L.S., et al.
出版: (2014)

Raman spectroscopy of epitaxial graphene on a SiC substrate
由: Ni, Z.H., et al.
出版: (2014)

Epitaxial growth and characterization of graphene on free-standing polycrystalline 3C-SiC
由: Huang, H., et al.
出版: (2014)

Ge diffusion and solid phase epitaxy growth to form Si 1 - XGex/Si and Ge on insulator structure
由: Gao, F., et al.
出版: (2014)

OO-Shell (Object-Oriented UNIX Shell)
由: Chua, Candice T., et al.
出版: (1998)

Selective growth of GaAs quantum dots on the triangle nanocavities bounded by SiO2 mask on Si substrate by MBE
由: Zheng, Y.B., et al.
出版: (2014)

Progress of SiGe / Si quantum wells for infrared detection
由: Gamani Karunasiri, R.P., et al.
出版: (2014)

Size difference in dielectric-breakdown-induced epitaxy in narrow n- and p-metal oxide semiconductor field effect transistors
由: Pey, K.L., et al.
出版: (2014)

Uniformly bounded components of normality
由: Wang, X., et al.
出版: (2014)

Modelling of molecular beam epitaxy thin film growth with void defect formation
由: Narong Chanlek
出版: (2008)

Enhancing modular OO verification with separation logic
由: Chin, W.-N., et al.
出版: (2013)

Enhancing modular OO verification with separation logic
由: Chin, W.-N., et al.
出版: (2013)

STI knowledge in berlin adolescents
由: von Rosen, F.T, et al.
出版: (2020)

Strain-mediated uniform islands in stacked Ge/Si(001) layers
由: Xu, M., et al.
出版: (2014)

Theoretical study of elementary processes in silicon-germanium epitaxial growth on SI(100) and SI1-xGEx (100) surfaces
由: LI QIANG
出版: (2010)

Scalable single-microring hybrid III-V/Si lasers for emerging narrow-linewidth applications
由: Wang, Jiawei, et al.
出版: (2024)

Bottom-up growth of epitaxial graphene on 6H-SiC(0001)
由: Huang, H., et al.
出版: (2014)