Dopant loss mechanism in n+/p germanium junctions during rapid thermal annealing
10.1149/1.2073048
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Main Authors: | Poon, C.H., Tan, L.S., Cho, B.J., Du, A.Y. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82168 |
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Institution: | National University of Singapore |
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