Highly oriented Ni(Pd)SiGe formation at 400 °c
Journal of Applied Physics
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Main Authors: | Jin, L.J., Pey, K.L., Choi, W.K., Fitzgerald, E.A., Antoniadis, D.A., Pitera, A.J., Lee, M.L., Tung, C.H. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82462 |
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Institution: | National University of Singapore |
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