Electrical properties of a-C: Mo films produced by dual-cathode filtered cathodic arc plasma deposition
Molybdenum-containing amorphous carbon (a-C:Mo) thin films were prepared using a dual-cathode filtered cathodic arc plasma source with a molybdenum and a carbon (graphite) cathode. The Mo content in the films was controlled by varying the deposition pulse ratio of Mo and C. Film sheet resistance was...
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| 格式: | Article |
| 語言: | English |
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2014
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| 在線閱讀: | http://www.scopus.com/inward/record.url?eid=2-s2.0-54049095861&partnerID=40&md5=63c07a51204eae0fa227b224fbb3e46e http://cmuir.cmu.ac.th/handle/6653943832/5428 |
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