Characterization of doped hydrogenated amorphous carbon films using electron cyclotron resonance chemical vapour deposition (ECR-CVD) technique for electronic applications

• Main Author: Rusli.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• Online Access: http://hdl.handle.net/10356/2800
• Institution: Nanyang Technological University

This project aims to investigate the characteristics of a-C:H in two aspects, namely, its doping achieved by adding N2 B2H6 and PH3 to the hydrocarbon gas mixture during film growth and to characterize the plasma during the growth process through optical emission spectroscopy (OES) and Langmuir prob...