A new method to form Au particle on silicon wafer

• Main Author: Yi, Qin.
• Other Authors: Tang Xiaohong
• Format: Final Year Project
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering
• Online Access: http://hdl.handle.net/10356/54206
• Institution: Nanyang Technological University

This project provides a research on a Reactive Ion Etch (RIE) based new method of synthesizing Au catalyst on the silicon substrate for semiconductor nanowires growths. The critical step in synthesizing semiconductor nanowires by VLS growth is the controlled preparation of the Au catalyst size on va...