Sub-micron channeling contrast microscopy on reactive ion etched deep Si microstructures
10.1016/S0168-583X(01)01255-1
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Main Authors: | Teo, E.J., Alkaisi, M., Bettiol, A.A., Osipowicz, T., Van Kan, J., Watt, F., Markwitz, A. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/77492 |
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Institution: | National University of Singapore |
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