Lanthanide-incorporated metal nitrides with tunable work function and good thermal stability for NMOS devices
10.1109/.2005.1469204
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Main Authors: | Ren, C., Chan, D.S.H., Faizhal, B.B., Li, M.-F., Yeo, Y.-C., Trigg, A.D., Agarwal, A., Balasubramanian, N., Pan, J.S., Lim, P.C., Kwong, D.-L. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83882 |
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Institution: | National University of Singapore |
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