Nickel silicidation on polycrystalline silicon germanium films
International Journal of Modern Physics B
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Main Authors: | Choi, W.K., Pey, K.L., Zhao, H.B., Osipowicz, T., Shen, Z.X. |
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其他作者: | ELECTRICAL & COMPUTER ENGINEERING |
格式: | Conference or Workshop Item |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/84011 |
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