Low cost and high resolution X-ray lithography for fabrication of microactuator
In this work, low-cost and high resolution X-ray lithography is developed by employing low-cost sputtered lift-off lead film on mylar sheet substrate and applied for fabrication of electrostatic actuators. X-ray mask was fabricated by conventional photolithography, Pb sputtering and lift-off process...
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| Main Authors: | , , , , , |
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| Format: | Book Series |
| Published: |
2017
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| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=79960049654&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/43030 |
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| Institution: | Chiang Mai University |