Investigation of multilayer thin films using ellipsometry

Investigation of multilayer thin films using ellipsometry

Spectroscopic Ellipsometry (SE) is a powerful and universal optical technique for the investigation of optical properties of semiconductor thin films. It is an extremely sensitive measurement tool for the characterization of single layer thin film and even multilayer structures. This project focus...

Saved in:

書目詳細資料
主要作者:	He, Lining.
其他作者:	Rusli
格式:	Final Year Project
語言:	English
出版:	2009
主題:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
在線閱讀:	http://hdl.handle.net/10356/16800
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University
語言:	English

相似書籍

Investigation of multilayer thin films using ellipsometry
由: Tikkiwal Vinay Anand.
出版: (2013)

To investigate the mechanical/adhesion properties and mechanical reliability of thin films in electronics materials
由: Wan, Kai Tak
出版: (2008)

Fabrication and characterization of MR thin films using IBS system
由: Qian, Yin
出版: (2009)

Characterization of multifunctional thin films and electronic devices
由: Aung, Thu Phyo
出版: (2010)

Fabrication and characterisation of tetrahedral amorphous carbon thin films
由: Li, Zhong
出版: (2010)

Thin film fabrication for optimal reflectivity coatings at 1064nm
由: Xiao, Zed Zhiqiang
出版: (2009)

Design and frabrication of deposition system for thin film display devices
由: Shi, Xu
出版: (2008)

Fabrication and characterization of thin film novel materials for microdevices and microsystems
由: Tay, Beng Kang
出版: (2008)

Characterization of thin films by filtered cathodic vacuum arc technology
由: Lau, Daniel Shu Ping, et al.
出版: (2008)

Morphological study of (100) textured and epitaxially textured diamond thin films
由: Yang, Baoxiong
出版: (2009)

Silicon thin film solar cells on ITO coated glass and silicon wafer
由: Ee, Allan Koon Tat
出版: (2009)

Simulation of optical reflectivity of single and multilayer coatings at 1064nm
由: Wong, Jason.
出版: (2009)

Micromachined pyroelectric infrared detector based on ferroelectric thin films
由: Sun, Ling Ling.
出版: (2008)

Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
由: Lee, Hiong Weng
出版: (2008)

Electronic properties of tetrahedral amorphous carbon thin films deposited by filtered cathodic vacuum arc technique
由: Tay, Beng Kang
出版: (2008)

Novel immunosensor based on (Ba,Sr)TiO3 thin film and in-plane interdigital gold electrodes
由: Choong, Ken Zhiwei.
出版: (2009)

Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition (MOD) technology for memory applications
由: Liu, Zhi Qing.
出版: (2009)

Strong violet and green-yellow electroluminescence from silicon nitride thin films multiply implanted with Si ions
由: Ding, Liang, et al.
出版: (2010)

Investigation of metal/metal oxide self-assembled nanoclusters in diamond-like carbon films
由: Tay, Beng Kang
出版: (2008)

Inductively coupled plasma chemical vapor deposition system for the synthesis of nanostructured thin films
由: Lee, Yi Chau.
出版: (2008)

Low temperature polycrystalline silicon thin films and thin film transistors
由: Li, Junfeng
出版: (2008)

Characterization of amorphous and diamond like carbon films using photothermal deflection spectorscopy
由: Zhang, Qing
出版: (2008)

Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
由: Yoon, Soon Fatt.
出版: (2008)

Energy storage capacitive thin films
由: Lee, Lai Yuan.
出版: (2009)

Stress measurement in copper films
由: Teo, Chee Hiang.
出版: (2008)

Characterization of ultrathin gate dielectric films
由: Leong, Li Ying.
出版: (2008)

Study of a thin absorbing metamaterial layer
由: Shen, Zhongxiang.
出版: (2008)

Studies on diamond and diamond-like carbon films
由: Tan, Hong Siang, et al.
出版: (2008)

Ferroelectric thin films using RF sputtering and SOL-GEL technology for electronic devices
由: Chen, Xiaofeng.
出版: (2008)

Development of diamond-like carbon films by ECR-CVD
由: Yang, Hong
出版: (2009)

Characterization of doped hydrogenated amorphous carbon films using electron cyclotron resonance chemical vapour deposition (ECR-CVD) technique for electronic applications
由: Rusli.
出版: (2008)

Fabrication and characterization of diamond-like carbon and diamond films using polymer as a precursor
由: Sun, Zhuo, et al.
出版: (2008)

Measurement and modelling of temperature-dependent thermal diffusivity of diamond films
由: Hui, Ping.
出版: (2008)

Investigation of the performance of a thermosyphon pin fin heat sink
由: Sun, Jianchun.
出版: (2008)

Properties of amorphous Si-carbon alloy film deposited by FCVA technique
由: Tan, Wee Ming
出版: (2008)

Characterization of amorphous silicon carbide thin films for display applications
由: Ahn, Jaeshin, et al.
出版: (2008)

Experimental and theoretical studies of negative bias temperature instability in ultra-thin gate dielectrics
由: Tan, Shyue Seng
出版: (2008)

Size and nitrogen catalytic effects on the magnetic properties of Fe thin films
由: Zhong, Wei Hua
出版: (2008)

Fabrication of Co1-xFe2+xO4 thick films by screen printing method
由: Huang, Chongxin.
出版: (2009)

Uncooled resonant infrared detector based on aluminum nitride piezoelectric film through charge generations and lattice absorptions
由: Tan, Chuan Seng, et al.
出版: (2014)