Electrical reliability of ultra-low k dielectric of an IC device of its optical spectroscopic characterization

In summary, electrical reliability of ultra-low k dielectrics of leading edge semiconductor Integrated circuits (IC) was investigated using complimentary vibrational spectroscopy of Raman and Fourier Transform Infra-Red (FTIR). In order to reduce the resistance and capacitance (RC) delay in advanced...

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Bibliographic Details
Main Author: Lam, Jeffrey Chor Keung
Other Authors: Sun Handong
Format: Theses and Dissertations
Language:English
Published: 2014
Subjects:
Online Access:https://hdl.handle.net/10356/55289
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Institution: Nanyang Technological University
Language: English

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