Fabrication of nano-crystalline silicon thin film on flexible substrate by cathodic vacuum arc
2009 International Display Manufacturing Conference, 3D Systems and Applications, and Asia Display, IDMC/3DSA/Asia Display 2009
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Main Authors: | Lin, T.-Y., Liao, Z.-J., Tsai, J., Chua, D., Peng, J.-L., Liu, C.-L., Mo, C.-N. |
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其他作者: | MATERIALS SCIENCE AND ENGINEERING |
格式: | Conference or Workshop Item |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/75226 |
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機構: | National University of Singapore |
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