Platinum germanosilicide as source/drain contacts in P-channel fin field-effect transistors (FinFETs)
10.1109/TED.2009.2021351
Saved in:
Main Authors: | Lee, R.T.P., Chi, D.Z., Yeo, Y.-C. |
---|---|
其他作者: | ELECTRICAL & COMPUTER ENGINEERING |
格式: | Article |
出版: |
2014
|
主題: | |
在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/82918 |
標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|
相似書籍
-
Schottky barrier height modulation of nickeldysprosium-alloy germanosilicide contacts for strained P-FinFETs
由: Sinha, M., et al.
出版: (2014) -
P-channel tri-gate FinFETs featuring Ni1-yPtySiGe source/drain contacts for enhanced drive current performance
由: Lee, R.T.-P., et al.
出版: (2014) -
Sulfur-induced PtSi:C/Si:C Schottky barrier height lowering for realizing N-channel FinFETs with reduced external resistance
由: Lee, R.T.-P., et al.
出版: (2014) -
Contact-resistance reduction for strained n-FinFETs with silicon-carbon source/drain and platinum-based silicide contacts featuring tellurium implantation and segregation
由: Koh, S.-M., et al.
出版: (2014) -
N-channel FinFETs with 25-nm gate length and Schottky-Barrier source and drain featuring Ytterbium silicide
由: Lee, R.T.P., et al.
出版: (2014)