Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique
10.1116/1.2712193
Saved in:
Main Authors: | Teo, E.H.T., Lee, M.L., Lee, C.K., Ee, C.L., Tay, B.K., Chua, D.H.C. |
---|---|
Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/86804 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
Review of metal oxide films deposited by filtered cathodic vacuum arc technique
by: Tay, B.K., et al.
Published: (2014) -
Review of metal oxide films deposited by filtered cathodic vacuum arc technique
by: Tay, B.K., et al.
Published: (2014) -
Study of filtered cathodic vacuum arc technology and properties of tetrahedral amorphous carbon films
by: Tay, Beng Kang
Published: (2008) -
Electronic properties of tetrahedral amorphous carbon thin films deposited by filtered cathodic vacuum arc technique
by: Tay, Beng Kang
Published: (2008) -
Copper interconnect by filtered cathodic vacuum arc technique
by: Lau, Daniel Shu Ping, et al.
Published: (2008)