Nickel silicide formation using multiple-pulsed laser annealing
The effect of multiple-pulsed laser irradiation on Ni silicide formation in Ni(Ti) /Si system was studied. A layered structure consisting of both crystalline NiSi2 and Ni-rich Ni–Si amorphous phases with a protective TiOx overlayer was formed after five-pulsed laser annealing at 0.4 J...
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Main Authors: | Setiawan, Y., Chow, F. L., Lee, Pooi See, Pey, Kin Leong, Wang, X. C., Lim, G. C. |
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Other Authors: | School of Materials Science & Engineering |
Format: | Article |
Language: | English |
Published: |
2012
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/94999 http://hdl.handle.net/10220/8009 |
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Institution: | Nanyang Technological University |
Language: | English |
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