Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices

US6156654

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書目詳細資料
Main Authors:	HO, CHAW SING, LEE, YUAN PING, LAP, CHAN, LU, YONG FENG, KARUNASIRI, R.P.G.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Patent
出版:	2012
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/32584
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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