A novel program-erasable high-k AlN-Si MIS capacitor

A novel program-erasable high-k AlN-Si MIS capacitor

10.1109/LED.2004.842100

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Bibliographic Details
Main Authors: Lai, C.H., Chin, A., Hung, B.F., Cheng, C.F., Yoo, W.J., Li, M.F., Zhu, C., McAlister, S.P., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Capacitor
Erase
High-k
Program
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81898
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Institution: National University of Singapore

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