$Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process$

Work function tunability by incorporating lanthanum and aluminum into refractory metal nitrides and a feasible integration process

10.1109/ICSICT.2006.306268

Saved in:

書目詳細資料
Main Authors:	Wang, X.P., Li, M.-F., Yu, H.Y., Ren, C., Loh, W.Y., Zhu, C.X., Chin, A., Trigg, A.D., Yeo, Y.-C., Biesemans, S., Lo, G.Q., Kwong, D.L.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/84366
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

相似書籍

Work function tunability of refractory metal nitrides by lanthanum or aluminum doping for advanced CMOS devices
由: Wang, X.P., et al.
出版: (2014)

Lanthanide-incorporated metal nitrides with tunable work function and good thermal stability for NMOS devices
由: Ren, C., et al.
出版: (2014)

Wide Vfband Vth tunability for metal-gated MOS devices with HfLaO gate dielectrics
由: Wang, X.P., et al.
出版: (2014)

Widely tunable work function TaN/Ru stacking layer on HfLaO gate dielectric
由: Wang, X.P., et al.
出版: (2014)

An integratable dual metal gate CMOS process using an ultrathin aluminum nitride buffer layer
由: Park, C.S., et al.
出版: (2014)

Physical and electrical properties of lanthanide-incorporated tantalum nitride for n -channel metal-oxide-semiconductor field-effect transistors
由: Ren, C., et al.
出版: (2014)

Spark plasma sintering of aluminum nitride
由: Tan, Mui Ting.
出版: (2008)

Feasibility study of using thin aluminum nitride film as a buffer layer for dual metal gate process
由: Park, C.S., et al.
出版: (2014)

Work function tuning of metal nitride electrodes for advanced CMOS devices
由: Ren, C., et al.
出版: (2014)

Ion-assisted pulsed laser deposition of aluminum nitride thin films
由: Lu, Y.F., et al.
出版: (2014)

Aluminum nitride on insulator (AINOI) platform for mid-infrared photonics
由: Dong, Bowei, et al.
出版: (2020)

A Novel Approach for Integration of Dual Metal Gate Process Using Ultra Thin Aluminum Nitride Buffer Layer
由: Park, C.S., et al.
出版: (2014)

Spark plasma sintering of Sm2O3-doped aluminum nitride
由: Khor, Khiam Aik, et al.
出版: (2012)

Room-temperature visible electroluminescence from aluminum nitride thin film embedded with aluminum nanocrystals
由: Yang, Ming, et al.
出版: (2010)

Thermal conductivity of titanium aluminum silicon nitride coatings deposited by lateral rotating cathode arc
由: Ding, X. Z., et al.
出版: (2013)

Characterization of lead lanthanum titanate thin films grown on fused quartz using MOCVD
由: Chen, H.Y., et al.
出版: (2014)

Aluminum nitride dielectric substrates with controlled porosity by reaction sintering
由: Tok, Alfred Iing Yoong
出版: (2008)

Characterization on ferroelectric scandium-doped aluminum nitride for memory applications
由: Wang, Zichu
出版: (2023)

TOF study of pulsed-laser ablation of aluminum nitride for thin film growth
由: Chu, C., et al.
出版: (2014)

Large scale graphene/hexagonal boron nitride heterostructure for tunable plasmonics
由: Zhang, K., et al.
出版: (2014)

Cerium and lanthanum promote floral initiation and reproductive growth of Arabidopsis thaliana
由: He, Y.-W., et al.
出版: (2014)

Uncooled resonant infrared detector based on aluminum nitride piezoelectric film through charge generations and lattice absorptions
由: Tan, Chuan Seng, et al.
出版: (2014)

Efficacy of chewed vs. crushed lanthanum on phosphorus binding in healthy volunteers
由: How, P.P., et al.
出版: (2014)

A tunable magnetic inductor
由: Ning, N., et al.
出版: (2014)

Mechanism of simultaneous formation of refractory-metal free C40 and C49 TiSi2 induced by Q-switched Nd: Yttrium-aluminum-garnet laser irradiation
由: Tan, S.C., et al.
出版: (2014)

Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform
由: Dong, Bowei, et al.
出版: (2021)

Polycrystalline Si nanowire SONOS nonvolatile memory cell fabricated on a gate-all-around (GAA) channel architecture
由: Fu, J., et al.
出版: (2014)

Effectiveness of aluminum incorporation in nickel silicide and nickel germanide metal gates for work function reduction
由: Lim, A.E.-J., et al.
出版: (2014)

Review of R&D in drying of refractories
由: Gong, Z.-X., et al.
出版: (2014)

Charging effect on current conduction in aluminum nitride thin films containing Al nanocrystals
由: Liu, Yang, et al.
出版: (2010)

Surface morphology of submicron crystals in aluminum nitride films grown by DC magnetron sputtering
由: P. Limsuwan, et al.
出版: (2018)

Wearable Triboelectric/Aluminum Nitride Nano-Energy-Nano-System with Self-Sustainable Photonic Modulation and Continuous Force Sensing
由: Dong, Bowei, et al.
出版: (2021)

Tunable phonon polaritons in atomically thin van der Waals crystals of boron nitride
由: Dai, S., et al.
出版: (2014)

Strain-tunable III-nitride/ZnO heterostructures for photocatalytic water-splitting: A hybrid functional calculation
由: Zhang, Z., et al.
出版: (2021)

Pattern-dependent tunable adhesion of superhydrophobic MnO 2 nanostructured film
由: Zhao, X.D., et al.
出版: (2014)

Light-induced instability in current conduction of aluminum nitride thin films embedded with Al nanocrystals
由: Liu, Zhen, et al.
出版: (2010)

ALUMINUM NITRIDE (AlN) AND POLYMER COMPOSITES AS A POTENTIAL FOR ENHANCED THERMAL PROPERTIES APPLICATIONS
由: PENG HAO
出版: (2020)

Work function tuning and material characteristics of lanthanide-incorporated metal nitride gate electrodes for NMOS device applications
由: Ren, C., et al.
出版: (2014)

Investigation of high-K dielectric films incorporated with Lanthanum and their application in flash memory devices
由: HE WEI
出版: (2010)

Q-switched tunable fiber laser with aluminum oxide saturable absorber and Sagnac loop mirror
由: S.F.S.M. Noor, et al.
出版: (2020)