Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

Deposition of polymeric nitrogenated amorphous carbon films (a-C:H:N) using electron cyclotron resonance CVD

10.1016/S0040-6090(98)01332-7

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書目詳細資料
Main Authors:	Yoon, S.F., Rusli, Ahn, J., Zhang, Q., Yang, C.Y., Yang, H., Watt, F.
其他作者:	PHYSICS
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/96172
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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