Electrical properties of a-C: Mo films produced by dual-cathode filtered cathodic arc plasma deposition
Molybdenum-containing amorphous carbon (a-C:Mo) thin films were prepared using a dual-cathode filtered cathodic arc plasma source with a molybdenum and a carbon (graphite) cathode. The Mo content in the films was controlled by varying the deposition pulse ratio of Mo and C. Film sheet resistance was...
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| Main Authors: | , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=54049095861&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60236 |
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| Institution: | Chiang Mai University |