Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications

Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications

This study deals with three kinds of metal oxide thin films, namely zirconium oxide, titanium oxide and aluminium oxide, prepared by filtered cathodic vacuum arc (FCVA). The influences of various process parameters (e.g. working pressure, substrate temperature & bias, etc.) on the film propertie...

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書目詳細資料
主要作者:	Zhao, Zhiwei
其他作者:	Tay Beng Kang
格式:	Theses and Dissertations
出版:	2008
主題:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
在線閱讀:	https://hdl.handle.net/10356/4033
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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