Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor.
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主要作者: | Lee, Hiong Weng |
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其他作者: | Lau Shu Ping, Daniel |
格式: | Theses and Dissertations |
出版: |
2008
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在線閱讀: | https://hdl.handle.net/10356/4572 |
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