Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films

Electrical characterization of radio frequency sputtered hydrogenated amorphous silicon carbide films

Journal of Applied Physics

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書目詳細資料
Main Authors:	Choi, W.K., Han, L.J., Loo, F.L.
其他作者:	ELECTRICAL ENGINEERING
格式:	Article
出版:	2014
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/80388
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	National University of Singapore

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