Source/drain engineering for In0.7Ga0.3As N-channel metal-oxide-semiconductor field-effect transistors. Raised source/drain with in situ doping for series resistance reduction
10.1143/JJAP.50.04DF01
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Main Authors: | Gong, X., Chin, H.-C., Koh, S.-M., Wang, L., Ivana, Zhu, Z., Wang, B., Chia, C.K., Yeo, Y.-C. |
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其他作者: | ELECTRICAL & COMPUTER ENGINEERING |
格式: | Article |
出版: |
2014
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在線閱讀: | http://scholarbank.nus.edu.sg/handle/10635/83039 |
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機構: | National University of Singapore |
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