Method of fabricating a CMOS device with dual metal gate electrodes
US7316950
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Main Authors: | PARK, CHANG SEO, CHO, BYUNG JIN, BALASUBRAMANIAN, NARAYANAN T. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Patent |
Published: |
2012
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32753 |
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Institution: | National University of Singapore |
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