Work function tuning of metal nitride electrodes for advanced CMOS devices

Work function tuning of metal nitride electrodes for advanced CMOS devices

10.1016/j.tsf.2005.09.081

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書目詳細資料
Main Authors:	Ren, C., Faizhal, B.B., Chan, D.S.H., Li, M.-F., Yeo, Y.-C., Trigg, A.D., Balasubramanian, N., Kwong, D.-L.
其他作者:	ELECTRICAL & COMPUTER ENGINEERING
格式:	Conference or Workshop Item
出版:	2014
主題:	Lanthanide Metal gate electrode Metal nitride Work function tuning
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/84367
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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