Proton beam micromachining: A new tool for precision three-dimensional microstructures

Proton beam micromachining: A new tool for precision three-dimensional microstructures

10.1016/S0924-4247(01)00574-X

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書目詳細資料
Main Authors:	Van Kan, J.A., Bettiol, A.A., Wee, B.S., Sum, T.C., Tang, S.M., Watt, F.
其他作者:	PHYSICS
格式:	Article
出版:	2014
主題:	High aspect ratio Micromachining Nuclear microscope Plating Proton beam
在線閱讀:	http://scholarbank.nus.edu.sg/handle/10635/97635
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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