Impact of decoupled plasma nitridation of ultra-thin gate oxide on the performance of p-channel MOSFETs
10.1088/0268-1242/17/6/101
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Main Authors: | Lek, C.M., Cho, B.J., Ang, C.H., Tan, S.S., Loh, W.Y., Zhen, J.Z., Lap, C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Others |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/67966 |
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Institution: | National University of Singapore |
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