Very high density RF MIM capacitor compatible with VLSI

Very high density RF MIM capacitor compatible with VLSI

10.1109/MWSYM.2005.1516582

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Bibliographic Details
Main Authors: Chiang, K.C., Lai, C.H., Chin, A., Kao, H.L., McAlister, S.P., Chi, C.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Capacitor
MIM
RF
TiTaO
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84349
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Institution: National University of Singapore

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